Application Areas
Semiconductor Chips ── Precise Humidity Control, Protecting Chip Yield
Semiconductor Chips
Precise humidity control, protecting chip yield
Durable and reliable
Active moisture prevention, fearless of condensation
Flexible deployment, convenient customization
Applicable scenarios
As a full-process guardian of chip manufacturing, Hengyuan humidity management system is deeply adapted to wafer production, packaging testing, cleanroom and other scenarios. Through the synergy of high-polymer humidity-regulating materials and high-precision sensors, it achieves precise humidity control of the manufacturing environment, completely eliminating risks such as electrostatic breakdown, photoresist failure, and metal layer oxidation.
The system breaks through the bottleneck of slow response of traditional temperature control equipment. In key processes such as the yellow light area and etching area, it dynamically maintains a constant humidity environment to ensure that the wafer surface is free of condensation and dust adsorption. The high-polymer fiber material has strong weather resistance and stable performance, protecting the equipment's extended lifespan, helping to improve chip yield, and providing reliable protection for high-end processes.
Packaging testing environment
Prevent packaging materials from absorbing moisture and deformation, reducing the risk of failure
Cleanroom storage
Maintain a super-clean environment and avoid oxidation of precision components
Photoresist coating area
Precise humidity control to ensure uniform colloid adhesion
Contact Information
If you have any questions or need assistance
Please feel free to contact our team
Company Address:
No. 77, Fulin Road, Xinhe Town, Chongming District, Shanghai
Building No. 12, Chuangzhiyuan
No. 1688, Wangu Technology Park, Guoquan North Road, Yangpu District, Shanghai
Room 1101-B, Building A8
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If you have any questions or need assistance
Please feel free to contact our team
400-960-0121
Company Address:
No. 329, Haishang Road, Lingang New Area, Fengxian District, Shanghai